1/19/2010	9:25:15 AM	Main Vac valve closed
1/19/2010	9:25:24 AM	Helium valve opened
1/19/2010	9:25:25 AM	Helium valve closed
1/19/2010	9:25:28 AM	Helium MFC set to  500.000000
1/19/2010	9:25:38 AM	Bypass solenoid MFC set to  760.000000
1/19/2010	9:25:40 AM	Helium valve opened
1/19/2010	9:27:10 AM	Helium valve closed
1/19/2010	9:27:14 AM	Bypass valve closed
1/19/2010	9:27:21 AM	Helium valve opened
1/19/2010	9:27:22 AM	Helium valve closed
1/19/2010	9:28:46 AM	BCl3 MFC set to  5.000000
1/19/2010	9:29:20 AM	H2 MFC set to  500.000000
1/19/2010	9:29:25 AM	SiCl4 MFC set to  325.000000
1/19/2010	9:45:48 AM	Bypass solenoid MFC set to  0.000000
1/19/2010	9:45:55 AM	Bypass valve opened
1/19/2010	9:46:28 AM	Main Vac valve opened
1/19/2010	9:48:04 AM	Main Vac valve closed
1/19/2010	9:48:16 AM	Bypass solenoid MFC set to  760.000000
1/19/2010	9:48:17 AM	Helium valve opened
1/19/2010	9:49:52 AM	Helium valve closed
1/19/2010	9:49:54 AM	Bypass valve closed
1/19/2010	9:49:58 AM	Bypass solenoid MFC set to  0.000000
1/19/2010	9:49:59 AM	Bypass valve opened
1/19/2010	9:50:34 AM	Main Vac valve opened
1/19/2010	9:52:30 AM	Main Vac valve closed
1/19/2010	9:52:38 AM	Bypass solenoid MFC set to  760.000000
1/19/2010	9:52:39 AM	Helium valve opened
1/19/2010	9:54:12 AM	Bypass valve closed
1/19/2010	9:54:13 AM	Helium valve closed
1/19/2010	10:04:48 AM	Bypass solenoid MFC set to  0.000000
1/19/2010	10:04:49 AM	Bypass valve opened
1/19/2010	10:06:05 AM	Main Vac valve opened
1/19/2010	10:12:21 AM	Main Vac valve closed
1/19/2010	10:12:21 AM	Bypass valve closed
1/19/2010	10:12:31 AM	Bypass valve opened
1/19/2010	10:12:33 AM	Main Vac valve opened
1/19/2010	10:15:35 AM	Main Vac valve closed
1/19/2010	10:15:42 AM	Bypass solenoid MFC set to  760.000000
1/19/2010	10:15:42 AM	Helium valve opened
1/19/2010	10:17:10 AM	Bypass valve closed
1/19/2010	10:17:11 AM	Helium valve closed
1/19/2010	10:27:29 AM	Bypass solenoid MFC set to  0.000000
1/19/2010	10:27:31 AM	Bypass valve opened
1/19/2010	10:27:31 AM	Helium valve opened
1/19/2010	10:27:33 AM	Helium valve closed
1/19/2010	10:27:50 AM	Bypass valve closed
1/19/2010	10:27:54 AM	Bypass valve opened
1/19/2010	10:28:10 AM	Main Vac valve opened
1/19/2010	10:28:31 AM	Bypass valve closed
1/19/2010	10:28:32 AM	Main Vac valve closed
1/19/2010	10:28:41 AM	Main Vac valve opened
1/19/2010	10:28:45 AM	Bypass valve opened
1/19/2010	10:28:55 AM	Bypass valve closed
1/19/2010	10:28:55 AM	Main Vac valve closed
1/19/2010	10:29:09 AM	Main Vac valve opened
1/19/2010	10:29:30 AM	Main Vac valve closed
1/19/2010	10:29:37 AM	Bypass solenoid MFC set to  760.000000
1/19/2010	10:29:39 AM	Bypass valve opened
1/19/2010	10:29:40 AM	Helium valve opened
1/19/2010	10:31:00 AM	Helium valve closed
1/19/2010	10:31:01 AM	Bypass valve closed
1/19/2010	10:34:35 AM	Bypass solenoid MFC set to  0.000000
1/19/2010	10:34:37 AM	Bypass valve opened
1/19/2010	10:35:09 AM	Main Vac valve opened
1/19/2010	10:35:33 AM	Helium valve opened
1/19/2010	10:37:19 AM	Helium valve closed
1/19/2010	10:37:47 AM	Helium valve opened
1/19/2010	10:37:57 AM	Helium valve closed
1/19/2010	10:39:28 AM	Helium valve opened
1/19/2010	10:39:56 AM	Helium valve closed
1/19/2010	10:41:16 AM	Main Vac valve closed
1/19/2010	10:41:17 AM	Bypass valve closed
1/19/2010	10:41:31 AM	Bypass valve opened
1/19/2010	10:41:31 AM	Main Vac valve opened
1/19/2010	10:48:51 AM	Main Vac valve closed
1/19/2010	10:48:51 AM	Bypass valve closed
1/19/2010	10:49:04 AM	Bypass valve opened
1/19/2010	10:49:04 AM	Main Vac valve opened
1/19/2010	10:49:44 AM	Main Vac valve closed
1/19/2010	10:50:00 AM	Bypass solenoid MFC set to  760.000000
1/19/2010	10:50:01 AM	H2 valve opened
1/19/2010	10:51:33 AM	Bypass valve closed
1/19/2010	11:15:42 AM	SiCl4 pre valve opened
1/19/2010	11:15:44 AM	SiCl4 post valve opened
1/19/2010	11:15:45 AM	BCl3 valve opened
1/19/2010	11:35:30 AM	SiCl4 post valve closed
1/19/2010	11:35:31 AM	SiCl4 pre valve closed
1/19/2010	11:35:33 AM	BCl3 valve closed
1/19/2010	11:56:01 AM	H2 valve closed
1/19/2010	11:56:23 AM	Bypass solenoid MFC set to  0.000000
1/19/2010	11:56:40 AM	Bypass valve opened
1/19/2010	11:56:56 AM	Main Vac valve opened
1/19/2010	11:57:22 AM	Main Vac valve closed
1/19/2010	11:57:22 AM	Bypass valve closed
1/19/2010	11:57:28 AM	Bypass valve opened
1/19/2010	11:57:29 AM	Main Vac valve opened
1/19/2010	2:40:46 PM	Main Vac valve closed
1/19/2010	2:40:58 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	2:40:59 PM	Helium valve opened
1/19/2010	2:43:27 PM	Helium MFC set to  500.000000
1/19/2010	2:44:22 PM	Bypass valve closed
1/19/2010	2:44:23 PM	Helium valve closed
1/19/2010	2:59:25 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	2:59:28 PM	Bypass valve opened
1/19/2010	3:00:07 PM	Main Vac valve opened
1/19/2010	3:01:04 PM	Main Vac valve closed
1/19/2010	3:01:27 PM	Main Vac valve opened
1/19/2010	3:01:36 PM	Helium valve opened
1/19/2010	3:01:52 PM	Helium valve closed
1/19/2010	3:02:26 PM	Main Vac valve closed
1/19/2010	3:02:31 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	3:02:32 PM	Helium valve opened
1/19/2010	3:03:07 PM	Helium valve closed
1/19/2010	3:03:11 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	3:03:39 PM	Main Vac valve opened
1/19/2010	3:07:27 PM	Helium valve opened
1/19/2010	3:07:52 PM	Helium valve closed
1/19/2010	3:08:39 PM	Helium valve opened
1/19/2010	3:09:06 PM	Helium valve closed
1/19/2010	3:11:50 PM	Helium valve opened
1/19/2010	3:12:10 PM	Helium valve closed
1/19/2010	3:13:35 PM	Main Vac valve closed
1/19/2010	3:13:47 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	3:13:48 PM	H2 valve opened
1/19/2010	3:15:34 PM	Bypass valve closed
1/19/2010	3:36:54 PM	SiCl4 pre valve opened
1/19/2010	3:36:55 PM	SiCl4 post valve opened
1/19/2010	3:36:56 PM	BCl3 valve opened
1/19/2010	3:57:05 PM	BCl3 valve closed
1/19/2010	3:57:06 PM	SiCl4 post valve closed
1/19/2010	3:57:07 PM	SiCl4 pre valve closed
1/19/2010	4:16:52 PM	H2 valve closed
1/19/2010	4:17:08 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	4:17:12 PM	Bypass valve opened
1/19/2010	4:17:28 PM	Main Vac valve opened
1/19/2010	4:27:48 PM	Main Vac valve closed
1/19/2010	4:27:55 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	4:27:56 PM	Helium valve opened
1/19/2010	4:29:21 PM	Bypass valve closed
1/19/2010	4:29:22 PM	Helium valve closed
1/19/2010	4:40:45 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	4:40:47 PM	Bypass valve opened
1/19/2010	4:41:23 PM	Main Vac valve opened
1/19/2010	4:42:34 PM	Helium valve opened
1/19/2010	4:43:12 PM	Helium valve closed
1/19/2010	4:43:52 PM	Helium valve opened
1/19/2010	4:44:45 PM	Helium valve closed
1/19/2010	4:45:33 PM	Helium valve opened
1/19/2010	4:46:24 PM	Helium valve closed
1/19/2010	4:47:08 PM	Main Vac valve closed
1/19/2010	4:47:09 PM	Bypass valve closed
1/19/2010	4:47:16 PM	Bypass valve opened
1/19/2010	4:47:16 PM	Main Vac valve opened
1/19/2010	4:48:25 PM	Helium valve opened
1/19/2010	4:48:40 PM	Helium valve closed
1/19/2010	4:49:37 PM	Main Vac valve closed
1/19/2010	4:49:46 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	4:49:47 PM	H2 valve opened
1/19/2010	4:51:28 PM	Bypass valve closed
1/19/2010	5:12:55 PM	Helium valve closed
1/19/2010	5:12:55 PM	H2 valve closed
1/19/2010	5:12:55 PM	BCl3 valve closed
1/19/2010	5:12:55 PM	PH3 valve closed
1/19/2010	5:12:55 PM	SiCl4 pre valve closed
1/19/2010	5:12:55 PM	SiCl4 post valve closed
1/19/2010	5:12:55 PM	Main Vac valve closed
1/19/2010	5:12:55 PM	Bubbler valve closed
1/19/2010	5:12:55 PM	Bypass valve opened
1/19/2010	5:12:55 PM	Helium MFC set to  0.000000
1/19/2010	5:12:55 PM	H2 MFC set to  0.000000
1/19/2010	5:12:55 PM	BCl3 MFC set to  0.000000
1/19/2010	5:12:55 PM	PHl3 MFC set to  0.000000
1/19/2010	5:12:55 PM	SiCl4 MFC set to  0.000000
1/19/2010	5:12:55 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	5:12:55 PM	Tube furnace set to 0
1/19/2010	5:13:09 PM	Baratron reads 941.400613 Torr.  Emergency exit.
1/19/2010	5:13:09 PM	Program exited cleanly
1/19/2010	5:13:12 PM	Program started normally
1/19/2010	5:13:20 PM	Bypass valve opened
1/19/2010	5:13:22 PM	Bypass valve closed
1/19/2010	5:13:42 PM	Bypass valve opened
1/19/2010	5:13:49 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	5:13:59 PM	H2 MFC set to  0.000000
1/19/2010	5:14:04 PM	Helium MFC set to  100.000000
1/19/2010	5:14:09 PM	Helium valve opened
1/19/2010	5:14:12 PM	Helium valve closed
1/19/2010	5:14:26 PM	Helium valve opened
1/19/2010	5:14:58 PM	Helium valve closed
1/19/2010	5:14:59 PM	H2 valve opened
1/19/2010	5:15:00 PM	H2 valve closed
1/19/2010	5:15:02 PM	H2 valve opened
1/19/2010	5:15:03 PM	H2 valve closed
1/19/2010	5:15:16 PM	Bypass valve closed
1/19/2010	5:15:21 PM	H2 valve opened
1/19/2010	5:15:54 PM	SiCl4 pre valve opened
1/19/2010	5:15:55 PM	SiCl4 post valve opened
1/19/2010	5:16:05 PM	BCl3 valve opened
1/19/2010	5:36:18 PM	BCl3 valve closed
1/19/2010	5:36:25 PM	SiCl4 pre valve closed
1/19/2010	5:36:25 PM	SiCl4 post valve closed
1/19/2010	5:36:54 PM	H2 valve closed
1/19/2010	5:37:21 PM	H2 MFC set to  500.000000
1/19/2010	5:37:24 PM	H2 valve opened
1/19/2010	5:37:35 PM	SiCl4 MFC set to  325.000000
1/19/2010	5:37:43 PM	SiCl4 pre valve opened
1/19/2010	5:37:44 PM	SiCl4 post valve opened
1/19/2010	5:37:53 PM	SiCl4 post valve closed
1/19/2010	5:37:53 PM	SiCl4 pre valve closed
1/19/2010	5:38:08 PM	SiCl4 pre valve opened
1/19/2010	5:38:08 PM	SiCl4 post valve opened
1/19/2010	5:38:12 PM	SiCl4 post valve closed
1/19/2010	5:38:13 PM	SiCl4 pre valve closed
1/19/2010	5:38:18 PM	SiCl4 post valve opened
1/19/2010	5:38:19 PM	SiCl4 post valve closed
1/19/2010	5:38:20 PM	SiCl4 post valve opened
1/19/2010	5:38:28 PM	SiCl4 post valve closed
1/19/2010	5:38:31 PM	SiCl4 pre valve opened
1/19/2010	5:38:32 PM	SiCl4 post valve opened
1/19/2010	5:38:34 PM	SiCl4 pre valve closed
1/19/2010	5:38:39 PM	SiCl4 post valve closed
1/19/2010	5:58:03 PM	H2 valve closed
1/19/2010	5:58:16 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	5:58:19 PM	Bypass valve opened
1/19/2010	5:58:38 PM	Main Vac valve opened
1/19/2010	6:31:04 PM	Main Vac valve closed
1/19/2010	6:31:11 PM	Helium MFC set to  500.000000
1/19/2010	6:31:17 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	6:31:18 PM	Helium valve opened
1/19/2010	6:33:03 PM	Bypass valve closed
1/19/2010	6:33:04 PM	Helium valve closed
1/19/2010	6:43:02 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	6:43:12 PM	Bypass valve opened
1/19/2010	6:43:45 PM	Main Vac valve opened
1/19/2010	6:43:57 PM	Helium valve opened
1/19/2010	6:44:45 PM	Helium valve closed
1/19/2010	6:45:05 PM	Helium valve opened
1/19/2010	6:47:15 PM	Helium valve closed
1/19/2010	6:47:51 PM	Helium valve opened
1/19/2010	6:48:38 PM	Helium valve closed
1/19/2010	6:49:05 PM	Main Vac valve closed
1/19/2010	6:49:06 PM	Bypass valve closed
1/19/2010	6:49:11 PM	Bypass valve opened
1/19/2010	6:49:12 PM	Main Vac valve opened
1/19/2010	6:49:39 PM	Main Vac valve closed
1/19/2010	6:49:52 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	6:49:53 PM	H2 valve opened
1/19/2010	6:51:21 PM	Bypass valve closed
1/19/2010	7:12:36 PM	BCl3 MFC set to  5.000000
1/19/2010	7:12:48 PM	SiCl4 pre valve opened
1/19/2010	7:12:48 PM	SiCl4 post valve opened
1/19/2010	7:12:49 PM	BCl3 valve opened
1/19/2010	7:14:00 PM	SiCl4 MFC set to  325.000000
1/19/2010	7:14:12 PM	SiCl4 post valve closed
1/19/2010	7:14:12 PM	SiCl4 pre valve closed
1/19/2010	7:14:30 PM	SiCl4 pre valve opened
1/19/2010	7:14:30 PM	SiCl4 post valve opened
1/19/2010	7:14:34 PM	SiCl4 post valve closed
1/19/2010	7:14:35 PM	SiCl4 pre valve closed
1/19/2010	7:14:51 PM	BCl3 valve closed
1/19/2010	7:15:15 PM	SiCl4 MFC set to  325.000000
1/19/2010	7:15:23 PM	SiCl4 pre valve opened
1/19/2010	7:15:23 PM	SiCl4 post valve opened
1/19/2010	7:15:25 PM	SiCl4 post valve closed
1/19/2010	7:15:25 PM	SiCl4 pre valve closed
1/19/2010	7:25:31 PM	SiCl4 post valve opened
1/19/2010	7:25:32 PM	SiCl4 post valve closed
1/19/2010	7:25:39 PM	SiCl4 pre valve opened
1/19/2010	7:25:40 PM	SiCl4 post valve opened
1/19/2010	7:25:47 PM	SiCl4 pre valve closed
1/19/2010	7:25:48 PM	SiCl4 post valve closed
1/19/2010	7:26:23 PM	SiCl4 pre valve opened
1/19/2010	7:26:24 PM	SiCl4 post valve opened
1/19/2010	7:26:32 PM	SiCl4 pre valve closed
1/19/2010	7:26:37 PM	SiCl4 post valve closed
1/19/2010	7:27:24 PM	SiCl4 pre valve opened
1/19/2010	7:27:24 PM	SiCl4 post valve opened
1/19/2010	7:27:29 PM	SiCl4 pre valve closed
1/19/2010	7:27:32 PM	SiCl4 post valve closed
1/19/2010	7:28:40 PM	SiCl4 MFC set to  325.000000
1/19/2010	7:32:07 PM	SiCl4 MFC set to  0.000000
1/19/2010	7:32:18 PM	SiCl4 pre valve opened
1/19/2010	7:32:22 PM	SiCl4 pre valve closed
1/19/2010	7:32:31 PM	SiCl4 pre valve opened
1/19/2010	7:32:38 PM	SiCl4 MFC set to  325.000000
1/19/2010	7:32:47 PM	SiCl4 MFC set to  0.000000
1/19/2010	7:32:56 PM	SiCl4 MFC set to  325.000000
1/19/2010	7:33:01 PM	SiCl4 pre valve closed
1/19/2010	7:35:48 PM	SiCl4 pre valve opened
1/19/2010	7:35:49 PM	SiCl4 post valve opened
1/19/2010	7:36:20 PM	SiCl4 pre valve closed
1/19/2010	7:36:21 PM	SiCl4 post valve closed
1/19/2010	7:36:56 PM	H2 valve closed
1/19/2010	7:37:03 PM	H2 valve opened
1/19/2010	7:37:14 PM	SiCl4 pre valve opened
1/19/2010	7:37:14 PM	SiCl4 post valve opened
1/19/2010	7:37:24 PM	SiCl4 pre valve closed
1/19/2010	7:37:28 PM	SiCl4 post valve closed
1/19/2010	7:40:44 PM	SiCl4 pre valve opened
1/19/2010	7:40:44 PM	SiCl4 post valve opened
1/19/2010	7:40:50 PM	SiCl4 pre valve closed
1/19/2010	7:40:53 PM	SiCl4 post valve closed
1/19/2010	7:44:05 PM	H2 valve closed
1/19/2010	7:44:48 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	7:44:53 PM	Bypass valve opened
1/19/2010	7:45:10 PM	Main Vac valve opened
1/19/2010	8:03:07 PM	Main Vac valve closed
1/19/2010	8:03:12 PM	Bypass solenoid MFC set to  760.000000
1/19/2010	8:03:13 PM	Helium valve opened
1/19/2010	8:04:38 PM	Helium valve closed
1/19/2010	8:04:39 PM	Bypass valve closed
1/19/2010	8:15:14 PM	Bypass solenoid MFC set to  0.000000
1/19/2010	8:15:15 PM	Bypass valve opened
1/19/2010	8:15:47 PM	Main Vac valve opened
1/19/2010	8:15:53 PM	Helium valve opened
1/19/2010	8:18:05 PM	Helium valve closed
